Apparatus and methods for handling die carriers

ABSTRACT

Apparatus and methods for handling die carriers are disclosed. In one example, a disclosed apparatus includes: a load port configured to load a die carrier operable to hold a plurality of dies into a processing tool; and a lane changer coupled to the load port and configured to move at least one die in the die carrier to an input of the processing tool and transfer the at least one die into the processing tool for processing the at least one die.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.17/849,337, filed Jun. 24, 2022, which is a continuation of U.S. patentapplication Ser. No. 16/526,892, filed on Jul. 30, 2019, which claimspriority to U.S. Provisional Patent Application No. 62/718,848, filed onAug. 14, 2018, each of which is incorporated by reference herein in itsentirety.

BACKGROUND

During manufacturing of a semiconductor device, the device is usuallyprocessed at many work stations or processing machines. For example,integrated circuits are produced in large batches on a single wafer,which can be cut into many pieces each of which contains one copy of thecircuit and is called a die. Multiple dies can be carried on a platecalled boat, while multiple boats can be carried in a carrier calledmagazine before and after the dies are processed at a processing tool.

The transporting or conveying of a die carrier, e.g. a magazine, is animportant aspect in the total manufacturing process. While an automatedmaterial handling system (AMHS) may be used to automatically handle andtransport magazines between various processing machines (“tools”), humanoperation is conventionally required to load a magazine into aprocessing tool and unload a magazine from a processing tool.

To save human resource, a load port may be used to load and unloaddifferent types of dies to be processed, e.g. at a bumping die level.Existing design of load port can only support one magazine at a time,and cannot support different processing tools having different numbersand locations of flowing channels, which causes a bottle neck of workefficiency in a semiconductor fabrication facility (“FAB”). As such,existing apparatus and methods for handling die carriers are notentirely satisfactory.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that various features are not necessarily drawn to scale. In fact,the dimensions and geometries of the various features may be arbitrarilyincreased or reduced for clarity of discussion. Like reference numeralsdenote like features throughout specification and drawings.

FIG. 1 illustrates an exemplary die processing system, in accordancewith some embodiments of the present disclosure.

FIG. 2 illustrates another exemplary die processing system, inaccordance with some embodiments of the present disclosure.

FIG. 3 illustrates a perspective view of an exemplary load port with alane changer, in accordance with some embodiments of the presentdisclosure.

FIG. 4A illustrates a top view of an exemplary die processing systemwith a turn stage function, in accordance with some embodiments of thepresent disclosure.

FIG. 4B illustrates a top view of another exemplary die processingsystem with a turn stage function, in accordance with some embodimentsof the present disclosure.

FIG. 5A illustrates a top view of an exemplary loading apparatus, inaccordance with some embodiments of the present disclosure.

FIG. 5B illustrates a front view of the exemplary loading apparatusshown in FIG. 5A, in accordance with some embodiments of the presentdisclosure.

FIG. 5C illustrates a side view of the exemplary loading apparatus shownin FIG. 5A, in accordance with some embodiments of the presentdisclosure.

FIG. 6 illustrates a top view of an exemplary unloading apparatus, inaccordance with some embodiments of the present disclosure.

FIG. 7A illustrates a top view of another exemplary loading apparatus,in accordance with some embodiments of the present disclosure.

FIG. 7B illustrates a front view of the exemplary loading apparatusshown in FIG. 7A, in accordance with some embodiments of the presentdisclosure.

FIG. 7C illustrates a side view of the exemplary loading apparatus shownin FIG. 7A, in accordance with some embodiments of the presentdisclosure.

FIG. 8 is a flow chart illustrating an exemplary method for handling diecarriers, in accordance with some embodiments of the present disclosure.

FIG. 9 is a flow chart illustrating another exemplary method forhandling die carriers, in accordance with some embodiments of thepresent disclosure.

DETAILED DESCRIPTION

The following disclosure describes various exemplary embodiments forimplementing different features of the subject matter. Specific examplesof components and arrangements are described below to simplify thepresent disclosure. These are, of course, merely examples and are notintended to be limiting. For example, the formation of a first featureover or on a second feature in the description that follows may includeembodiments in which the first and second features are formed in directcontact, and may also include embodiments in which additional featuresmay be formed between the first and second features, such that the firstand second features may not be in direct contact. In addition, thepresent disclosure may repeat reference numerals and/or letters in thevarious examples. This repetition is for the purpose of simplicity andclarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly. Terms such as“attached,” “affixed,” “connected” and “interconnected,” refer to arelationship wherein structures are secured or attached to one anothereither directly or indirectly through intervening structures, as well asboth movable or rigid attachments or relationships, unless expresslydescribed otherwise.

Unless otherwise defined, all terms (including technical and scientificterms) used herein have the same meaning as commonly understood by oneof ordinary skill in the art to which this disclosure belongs. It willbe further understood that terms, such as those defined in commonly useddictionaries, should be interpreted as having a meaning that isconsistent with their meaning in the context of the relevant art and thepresent disclosure, and will not be interpreted in an idealized oroverly formal sense unless expressly so defined herein.

Reference will now be made in detail to the present embodiments of thedisclosure, examples of which are illustrated in the accompanyingdrawings. Wherever possible, the same reference numbers are used in thedrawings and the description to refer to the same or like parts.

An integrated circuit (IC) manufacturing may go through a plurality ofproduction steps, during which carriers are used to support and carrythe manufactured wafers and dies. The carriers for carrying device diesmay include boats, trays, glass carriers, magazines, etc. In oneembodiment, multiple dies can be carried on a boat, while multiple boatscan be carried in a magazine before and after the dies are processed ata processing tool. To save human resource, a load port may be used toload and unload die carriers during the IC manufacturing.

To further improve work efficiency and production quality in asemiconductor fabrication facility (“FAB”), the present teachingdiscloses apparatus and methods for automatically load and unload a diecarrier, e.g. a magazine holding multiple boats, with a multi-magazinestorage and a multi-lane changer for transferring each boat to acorresponding lane aligned with a flowing channel of a processing toolfor processing the dies in the boat.

In some embodiments, a disclosed apparatus includes a load port and alane changer coupled to the load port. The load port can load, into aprocessing tool, a magazine holding multiple boats each includingmultiple dies for processing. The lane changer has a conveyor and aplurality of lanes. In one embodiment, the load port comprises a pushbar operable to push a boat including at least one die from the magazineto the conveyor. The conveyor may move the boat along at least onedirection to one of the plurality of lanes to align the boat with aninput of the processing tool and convey the boat into the processingtool for processing the at least one die. The load port may comprise astorage space configured to store a plurality of die carriers at a sametime. In one embodiment, when a table of the load port receives a diecarrier, e.g. from a transport tool like OHT, the die carrier is placedin a first direction on a turn stage on the table. The turn stage isoperable to turn the die carrier from the first direction to a seconddirection for retrieving a boat from the die carrier and/or storing thedie carrier.

In one embodiment, the same load port further comprises an additionalpush bar to push the boat from the conveyor into the die carrier, and isfurther configured to unload the die carrier after the at least one dieis processed. In another embodiment, the disclosed apparatus includes asecond load port configured to unload the die carrier after the at leastone die is processed, and a second lane changer coupled to the secondload port and configured to transfer the at least one die from an outputof the processing tool into the die carrier with a second push barassociated with the second load port.

The present disclosure is applicable to all kinds of devices that loador unload die carriers. The disclosed apparatus can automatically move aboat to a corresponding lane to align the boat with an input, e.g. aflowing channel, of a processing tool, to support different types ofprocessing tools and/or a processing tool including multiple flowingchannels. This improves work efficiency, saves human operation resourcesand improves production quality by reducing human errors on themanufacturing floor.

FIG. 1 illustrates a top view of an exemplary die processing system 100,in accordance with some embodiments of the present disclosure. As shownin FIG. 1 , the die processing system 100 includes a first load port112, a first lane changer 114, a processing tool 150, a second lanechanger 124, a second load port 122, and a transport tool 190.

The transport tool 190 in this example may be an overhead hoisttransport (OHT) that can transport a die carrier 142, e.g. a magazineholding several boats 181 each including at least one die 182, betweendifferent processing tools during the IC manufacturing. The first loadport 112 in this example receives the die carrier 142 from the transporttool 190 and loads the die carrier 142 for the processing tool 150 toprocess at least one die in the die carrier 142. Accordingly, the secondload port 122 in this example unloads the die carrier 142 from theprocessing tool 150 after the at least one die is processed.

The first lane changer 114 in this example is coupled to the first loadport 112 and includes a plurality of lanes 183. The first load port 112may include a push bar 113 that is operable to push a boat from thereceived die carrier to a conveyor in the first lane changer 114. Theconveyor may move the boat along the Y direction and/or the Z directionto align the boat with an input of the processing tool 150. For example,when the processing tool 150 has a plurality of flowing channels 184,the conveyor of the first lane changer 114 may move each boat to acorresponding lane aligned with one of the plurality of flowing channels184, and convey the boat into the flowing channel of the processing tool150 along the X direction to perform a corresponding processing on thedies in the boat.

As shown in FIG. 1 , the transport tool 190 moves the die carrier 142along the X direction, while the die carrier 142 is placed along the Ydirection when the die carrier 142 is transported to the first load port112. That is, when the die carrier 142 is first placed onto a table ofthe first load port 112 in this example, the die carrier 142 extendsalong the Y direction. To properly push a boat from the received diecarrier to the conveyor in the first lane changer 114, the die carrier142 is turned by a turn stage on the table of the first load port 112.This turned die carrier 144 extends along the X direction. A door of theturned die carrier 144 may be opened automatically, e.g. by an openingmechanism coupled to the first load port 112. The opened die carrier 146includes boats to be pushed by the push bar 113 into the first lanechanger 114, while the opened die carrier 146 extends along the Xdirection.

In one embodiment, the die carrier direction of the transport tool 190is the same as the desired direction of the push bar 113, which meansthe die carrier 142 landed on the table of the first load port 112 willnot be turned before the boat in the die carrier 142 is pushed into thefirst lane changer 114. In another embodiment, the die carrier directionof the transport tool 190 and the desired direction of the push bar 113are not perpendicular to each other as shown in FIG. 1 , but form acertain angle (e.g. between 0° and 180°), which means the die carrier142 landed on the table of the first load port 112 will be turnedaccording to the certain angle before the boat in the die carrier 142 ispushed into the first lane changer 114.

The second lane changer 124 in this example is coupled to the secondload port 122 and includes a plurality of lanes 185. The second lanechanger 124 may include a conveyor that can move to a correspondingoutput of the processing tool 150 to receive a processed die boat. Forexample, when the processing tool 150 has a plurality of flowingchannels 184, the conveyor of the second lane changer 124 may move to acorresponding lane aligned with one of the plurality of flowing channels184 that outputs the processed boat, and move the processed boat alongthe Y direction and/or the Z direction to a lane aligned with a secondpush bar 123.

The second push bar 123 in this example is operable to push a processedboat from the conveyor in the second lane changer 124 to a die carrierstored at the second load port 122, along the X direction. The diecarrier receiving the processed boat may have a same type as that of thedie carrier 142. In this example, the second load port 122 includes aclosing mechanism that can automatically close a door onto the diecarrier stored at the second load port 122 to form a closed die carrier148. While the closed die carrier 148 extends along the X direction, aturn stage on the table of the second load port 122 may turn the closeddie carrier 148 to make the closed die carrier 148 extend along the Ydirection as the die carrier 142. As such, the transport tool 190 canpick up the turned die carrier from the table of the second load port122 and transport it to next processing tool for processing.

In one embodiment, the die carrier direction of the transport tool 190is the same as the desired direction of the second push bar 123, whichmeans the closed die carrier 148 landed on the table of the second loadport 122 will not be turned before the closed die carrier 148 is pickedup by the transport tool 190. In another embodiment, the die carrierdirection of the transport tool 190 and the desired direction of thesecond push bar 123 are not perpendicular to each other as shown in FIG.1 , but form a certain angle, which means the closed die carrier 148landed on the table of the second load port 122 will be turned accordingto the certain angle before the closed die carrier 148 is picked up bythe transport tool 190.

The processing tool 150 in this example performs one or more processingon the dies in each loaded boat, e.g. at the bumping die level, andoutputs the processed boat via an output. In this example, the input andthe output of the processing tool 150 are located on different sides ofthe processing tool 150. Accordingly, two load ports 112, 122 arelocated on two sides of the processing tool 150 respectively. While thefirst load port 112 is located on the input side of the processing tool150, the second load port 122 is located on the output side of theprocessing tool 150. As such, the first load port 112 and the secondload port 122 form a pair, and the first lane changer 114 and the secondlane changer 124 form a pair as well. In one embodiment, the first loadport 112, the first lane changer 114, the processing tool 150, thesecond lane changer 124, the second load port 122 and the transport tool190 are connected to each other, e.g. via a cable or bus line, such thatthey can communicate with each other to coordinate with respectiveoperations. In one embodiment, the die carrier 142/146 is transported inFIG. 1 along the path 188.

FIG. 2 illustrates a top view of another exemplary die processing system200, in accordance with some embodiments of the present disclosure. Asshown in FIG. 2 , the die processing system 200 includes a load port212, a lane changer 214, a processing tool 250 and a transport tool 290.

The transport tool 290 in this example may be an overhead hoisttransport (OHT) that can transport a die carrier 244, e.g. a magazineholding several boats each including at least one die, between differentprocessing tools during the IC manufacturing. The load port 212 in thisexample receives the die carrier 244 from the transport tool 290 andloads the die carrier 244 for the processing tool 250 to process atleast one die in the die carrier 244.

The lane changer 214 in this example is coupled to the load port 212 andincludes a plurality of lanes 283. The load port 212 may include a pushbar 213 that is operable to push a boat from the received die carrier toa conveyor in the lane changer 214. The conveyor may move the boat alongthe Y direction and/or the Z direction to align the boat with an inputof the processing tool 250. For example, when the processing tool 250has a plurality of flowing channels 284, the conveyor of the lanechanger 214 may move each boat to a corresponding lane aligned with oneof the plurality of flowing channels 284, and convey the boat into theflowing channel of the processing tool 250 along the X direction toperform a corresponding processing on the dies in the boat.

As discussed above, in case the die carrier direction of the transporttool 290 is different from the desired direction of the push bar 213 andforms a certain angle, the die carrier 244 landed on the table of theload port 212 will be turned according to the certain angle before theboat in the die carrier 244 is pushed into the lane changer 214. A doorof the turned die carrier 244 may be opened automatically, e.g. by anopening mechanism coupled to the load port 212, before a boat in theopened die carrier 246 is pushed by the push bar 213 into the lanechanger 214, while the opened die carrier 246 extends along the Xdirection.

In this example, the same load port 212 also unloads a die carrier fromthe processing tool 250 after the pushed boat is processed. The conveyorof the lane changer 214 can move to a corresponding output of theprocessing tool 250 to receive a processed die boat. For example, whenthe processing tool 250 has a plurality of flowing channels 284, theconveyor of the lane changer 214 may move to a corresponding lanealigned with one of the plurality of flowing channels 284 that outputsthe processed boat, and move the processed boat along the Y directionand/or the Z direction to a lane aligned with an additional push bar215.

The additional push bar 215 in this example is operable to push aprocessed boat from the conveyor in the lane changer 214 to a diecarrier stored at the load port 212, along the −X direction. The diecarrier receiving the processed boat may be the die carrier 244 or mayhave a same type as that of the die carrier 244. In this example, theload port 212 also includes a closing mechanism that can automaticallyclose a door onto the die carrier stored at the load port 212 to form aclosed die carrier. In case the die carrier direction of the transporttool 290 and the desired direction of the additional push bar 215 form acertain angle, the closed die carrier will be turned by the turn stageon the table of the load port 212 according to the certain angle beforethe transport tool 290 picks up the turned die carrier from the table ofthe load port 212 and transports it to next processing tool forprocessing.

The processing tool 250 in this example performs one or more processingon the dies in each loaded boat, e.g. at the bumping die level, andoutputs the processed boat via an output. In this example, the input andthe output of the processing tool 250 are located on a same side (theside of where the lane changer 214 is located) of the processing tool250. Accordingly, a single load port 212 is located on the input/outputside of the processing tool 250. In one embodiment, the load port 212,the lane changer 214, the processing tool 250 and the transport tool 290are connected to each other, e.g. via a cable or bus line, such thatthey can communicate with each other to coordinate with respectiveoperations. In one embodiment, the die carrier 246 is transported inFIG. 2 along the path 288.

FIG. 3 illustrates a perspective view of an apparatus 300 including anexemplary load port 312 with a lane changer 314, in accordance with someembodiments of the present disclosure. As shown in FIG. 3 , the loadport 312 includes a table 321 that is configured to receive a diecarrier 346, e.g. a magazine holding multiple boats each including oneor more dies, from a transport tool, for processing at least one die inthe die carrier 346 by a processing tool associated with the load port312.

The load port 312 in this example also includes a turn stage 323 coupledon the table 321 and operable to turn the die carrier 346 when needed.In one embodiment, the die carrier 346 is transported by the transporttool in a first direction and placed onto the turn stage 323 on thetable 321 by the transport tool. The turn stage 323 may turn the diecarrier 346 from the first direction to a second direction for storingthe die carrier 346 and/or retrieving a boat from the die carrier 346.

The load port 312 in this example also includes an identity (ID) reader322, e.g. a radio frequency (RF) ID reader, that is coupled on the table321 and operable to read information of the die carrier 346. Forexample, the ID reader 322 may read an RFID of the die carrier 346 todetermine whether the die carrier 346 is correctly scheduled forprocessing by the processing tool.

The load port 312 in this example may include a storage space 330configured to store a plurality of die carriers at a same time. Forexample, the storage space 330 may include multiple layers, e.g. 4layers, where each layer can store a die carrier. The storage space 330may include an elevator to transfer a die carrier from one layer toanother.

While a die carrier is stored at the storage space 330, a push bar 313of the load port 312 may push a boat including the at least one die fromthe die carrier 346 to the lane changer 314 for lane changing. In oneembodiment, the turn stage 323 turns the die carrier 346 to the seconddirection to align with the carrier storage direction of the storagespace 330. In another embodiment, the turn stage 323 turns the diecarrier 346 to the second direction to align with the desired pushingdirection of the push bar 313.

The lane changer 314 in this example is coupled to the load port 312 andcomprises a conveyor 340 and a plurality of lanes. The push bar 313 ofthe load port 312 may push a boat from the die carrier 346 to theconveyor 340 in the lane changer 314. The conveyor 340 in this exampleis configured to move the boat along at least one direction, e.g. the Ydirection and/or the Z direction in FIG. 3 , to one of the plurality oflanes to align the boat with an input of the processing tool. In oneembodiment, the processing tool is located at the −X direction of thelane changer 314. As such, the conveyor 340 conveys the boat into theprocessing tool along the −X direction in FIG. 3 .

In one embodiment, a processing tool may include multiple chambers eachof which corresponds to a different flowing channel. While the multipleflowing channels have different inputs, with different heights along theZ direction and/or different locations along the Y direction, theconveyor 340 of the lane changer 314 can move the boat to differentlanes of the lane changer 314 by moving the boat along the Y directionand/or the Z direction to align the boat with a corresponding input of aflowing channel of the processing tool. Similarly, while different typesof processing tools have different flowing channels with inputs atdifferent heights along the Z direction and/or different locations alongthe Y direction, the conveyor 340 of the lane changer 314 can move theboat to different lanes of the lane changer 314 by moving the boat alongthe Y direction and/or the Z direction to align the boat with acorresponding input of a flowing channel of a corresponding processingtool. That is, the disclosed lane changer 314 may load a boat intoinputs of various flowing channels of various types of processing tools,regardless where the inputs are located along the Y direction or Zdirection.

In one embodiment, a mapping sensor 350 is coupled to the load port 312or the lane changer 314 and configured to determine quantity informationand/or location information of boats in the die carrier 346. In anotherembodiment, a barcode reader 362, e.g. a two-dimensional barcode reader,is coupled to the load port 312 or the lane changer 314 and isconfigured to identify and trace each boat that is processed by theprocessing tool. In yet another embodiment, an optional automatedoptical inspection (AOI) sensor 364 is coupled to the load port 312 orthe lane changer 314 and is configured to determine quantity informationand/or size information of dies on the boat to be pushed into the lanechanger 314 for processing. In one example, the AOI sensor 364 maydetect a defect on a surface of a die on the boat, and determine tobypass the boat without sending the boat for processing by theprocessing tool.

As discussed above, the conveyor 340 in one embodiment is furtherconfigured to receive the processed boat from an output of theprocessing tool after the at least one die is processed, and move theprocessed boat along the Y direction and/or the Z direction to align theprocessed boat with an additional push bar associated with the load port312. The additional push bar is configured to push the processed boatfrom the conveyor 340 into the die carrier 346.

In one embodiment, the load port 312 also includes an opening mechanismconfigured to open a first door of the die carrier 346. The first dooris then stored in a door storage of the load port 312. In oneembodiment, the load port 312 is further configured to unload the diecarrier 346 after the at least one die is processed. In this case, theload port 312 further comprises a closing mechanism configured toretrieve a second door having a same model as the first door from thedoor storage, and close the second door onto the die carrier 346 thathas been unloaded.

FIG. 4A illustrates a top view of an exemplary die processing system 410with a turn stage function, in accordance with some embodiments of thepresent disclosure. As shown in FIG. 4A, the die processing system 410includes a processing tool 415 for processing dies. The dies are loadedinto the processing tool 415 for processing by a load port 412 on oneside of the processing tool 415, and unloaded from the processing tool415 after processing by a load port 416 on an opposite side of theprocessing tool 415.

A transport tool 419 in this example may be an OHT that transports a diecarrier 411 to the load port 412 for processing, and picks up a diecarrier 417 from the load port 416 after processing. Each of the diecarrier 411 and the die carrier 417 may be a magazine holding severalboats each including at least one die. As discussed above, the transporttool 419 may place the die carrier 411 onto a table of the load port 412along the Y direction, while the die carrier 411 needs to extend alongthe X direction for either storage or boat retrieving at the load port412. As such, a turn stage on the table of the load port 412 turns thedie carrier 411 to make the die carrier 411 extend along the Xdirection. Similarly, after the die processing at the processing tool415, the die carrier 417 extends along the X direction when the diecarrier 417 is first unloaded by the load port 416 to a table of theload port 416. Then a turn stage on the table of the load port 416 turnsthe die carrier 417 to make the die carrier 417 extend along the Ydirection for the transport tool 419 to pick up.

In one embodiment, the direction of the die carrier held by thetransport tool 419 and the desired direction of the die carrier for diecarrier storage or boat retrieving are not perpendicular to each other,but form a certain angle. Then, the die carrier 411 landed on the tableof the load port 412 will be turned according to the certain anglebefore the boat in the die carrier 411 is retrieved, e.g. pushed into alane changer coupled to the load port 412. Accordingly, the die carrier417 landed on the table of the load port 416 will be turned according tothe certain angle before the die carrier 417 is picked up by thetransport tool 419.

FIG. 4B illustrates a top view of another exemplary die processingsystem 420 with a turn stage function, in accordance with someembodiments of the present disclosure. As shown in FIG. 4B, the dieprocessing system 420 includes a processing tool 425 for processingdies. The dies are loaded into the processing tool 425 for processing bya load port 422 on one side of the processing tool 425, and unloadedfrom the processing tool 425 after processing by a load port 426 on anopposite side of the processing tool 425.

A transport tool 428 in this example may be an OHT that transports a diecarrier 421 to the load port 422 for processing. A transport tool 429 inthis example may be an OHT that picks up a die carrier 427 from the loadport 426 after processing. Each of the die carrier 421 and the diecarrier 427 may be a magazine holding several boats each including atleast one die. In this example, the transport tool 428 may place the diecarrier 421 onto a table of the load port 422 along the Y direction,which is the same direction as the desired direction of the die carrier421 for either die carrier storage or boat retrieving at the load port422. As such, the die carrier 421 landed on the table of the load port422 need not and will not be turned before the boat in the die carrier421 is retrieved, e.g. pushed into a lane changer coupled to the loadport 422. Accordingly, the die carrier 427 landed on the table of theload port 426 need not and will not be turned before the die carrier 427is picked up by the transport tool 429.

The die processing system 410 and the die processing system 420 may belocated in a same FAB. That is, once the direction of a die carrier heldby an OHT is fixed, the desired direction of the die carrier for diecarrier storage or boat retrieving can be different for differentlayouts of different load ports. In addition, a load port direction andits desired die carrier direction may change due to, e.g. a movement ofthe associated processing tool, or reassigning the load port to anotherprocessing tool. The direction of a die carrier held by an OHT may alsochange in some scenario. As such, the die carrier needs to be turned inmany cases before and/or after the die processing, e.g. by a turn stagedisclosed herein.

FIG. 5A illustrates a top view of an exemplary loading apparatus 500, inaccordance with some embodiments of the present disclosure. As shown inFIG. 5A, the loading apparatus 500 includes a load port 510 and a lanechanger 520 coupled to the load port 510. The load port 510 in thisexample loads a die carrier to a processing tool to process at least onedie in the die carrier. The lane changer 520 in this example is coupledto the load port 510 and includes a plurality of lanes. The processingtool (not shown in FIG. 5A) in this example would be located to the Xdirection of the lane changer 520.

The load port 510 in this example may receive a die carrier, e.g. amagazine holding multiple boats each including at least one die, from atransport tool that lands the magazine onto a turn stage 512 on a tableof the load port 510. As discussed above, the turn stage 512 may turnthe magazine when needed due to a certain angle between the magazineholding direction of the transport tool and the desired magazinedirection due to magazine storage or boat retrieving. The turnedmagazine is transferred to a magazine storage zone 516 of the load port510. While the turned magazine is at the magazine storage zone 516, apush bar 514 of the load port 510 can push a boat from the magazine to aconveyor 522 in the lane changer 520. The conveyor 522 may move the boatalong the Y direction and/or the Z direction to align the boat with aninput of the processing tool, and convey the boat into the processingtool for die processing.

FIG. 5B illustrates a front view of the exemplary loading apparatus 500shown in FIG. 5A, in accordance with some embodiments of the presentdisclosure. As shown in FIG. 5B, the magazine storage zone 516 can storemultiple magazines at the same time. The push bar 514 is located to the−X direction of the magazine to be loaded for die processing. The pushbar 514 pushes a boat from the magazine to the X direction onto theconveyor 522 of the lane changer 520 for conveying to a correspondinginput of the processing tool.

FIG. 5C illustrates a side view of the exemplary loading apparatus 500shown in FIG. 5A, in accordance with some embodiments of the presentdisclosure. FIG. 5C shows a side view from the side of the lane changer520. As shown in FIG. 5C, the conveyor 522 can move along the Ydirection and the Z direction to fit different heights and locations ofdifferent processing tool inputs. In one embodiment, the lane changer520 may include multiple conveyors that can convey multiple boats at thesame time.

FIG. 6 illustrates a top view of an exemplary unloading apparatus 600,in accordance with some embodiments of the present disclosure. Theloading apparatus 500 shown in FIGS. 5A-5C is configured only forloading magazines for a processing tool. The unloading apparatus 600 inFIG. 6 is correspondingly configured only for unloading magazines fromthe processing tool. The processing tool (not shown in FIG. 6 ) in thisexample would be located to the −X direction of the unloading apparatus600.

As shown in FIG. 6 , the unloading apparatus 600 includes a load port610 and a lane changer 620 coupled to the load port 610. The lanechanger 620 in this example includes a plurality of lanes and receives aprocessed boat from the processing tool. The lane changer 620 mayinclude a conveyor 622 that can move to a corresponding output of theprocessing tool to receive the processed die boat. For example, when theprocessing tool has a plurality of flowing channels, the conveyor 622 ofthe lane changer 620 may move to a corresponding lane aligned with oneof the plurality of flowing channels that outputs the processed boat,and move the processed boat along the Y direction and/or the Z directionto a lane aligned with a push bar 614 coupled to the load port 610.

For example, when the conveyor 622 conveys the processed boat to aninterface between the load port 610 and the lane changer 620, the pushbar 614 in this example is operable to push the processed boat from theconveyor 622 to a magazine stored at a magazine storage zone 616 of theload port 610, along the X direction. The magazine receiving theprocessed boat may have a same type as that of the magazine loaded bythe load port 510. In this example, a turn stage 612 on the table of theload port 610 may turn the unloaded magazine when needed due to acertain angle between the magazine holding direction of the transporttool and the desired magazine direction due to magazine storage or boatpushing. As such, the transport tool can pick up the turned magazinefrom the table of the load port 610 and transport the magazine to a nextprocessing tool for processing.

In this example, the input and the output of the processing tool arelocated on different sides of the processing tool. While the loadingapparatus 500 is located to the −X direction of the processing tool, theunloading apparatus 600 is located to the X direction of the processingtool. As such, the loading apparatus 500 and the unloading apparatus 600form a pair. In one embodiment, the loading apparatus 500, the unloadingapparatus 600 and the processing tool are connected to each other, e.g.via a cable or bus line, such that they can communicate with each otherto coordinate with respective operations.

FIG. 7A illustrates a top view of another exemplary loading apparatus700, in accordance with some embodiments of the present disclosure. Asshown in FIG. 7A, the loading apparatus 700 includes a load port 710 anda lane changer 720 coupled to the load port 710. The load port 710 inthis example loads a die carrier to a processing tool to process atleast one die in the die carrier. The lane changer 720 in this exampleincludes a plurality of lanes and conveys at least one die into theprocessing tool for processing. The processing tool (not shown in FIG.7A) in this example would be located to the X direction of the lanechanger 720.

The load port 710 in this example may receive a die carrier, e.g. amagazine holding multiple boats each including at least one die, from atransport tool that lands the magazine onto a turn stage 712 on a tableof the load port 710. As discussed above, the turn stage 712 may turnthe magazine when needed due to a certain angle between the magazineholding direction of the transport tool and the desired magazinedirection due to magazine storage or boat retrieving. The turnedmagazine is transferred to a magazine storage zone 716 of the load port710. While the turned magazine is at the magazine storage zone 716, apush bar 713 of the load port 710 can push a boat from the magazine to aconveyor 722 in the lane changer 720, along the X direction. Theconveyor 722 may move the boat along the Y direction and/or the Zdirection to align the boat with an input of the processing tool, andconvey the boat into the processing tool for die processing.

In this example, the loading apparatus 700 is also an unloadingapparatus configured for unloading magazines from the processing tool.The output and the input of the processing tool are located on a sameside. After the die processing, the conveyor 722 can move to acorresponding output of the processing tool to receive the processed dieboat, and conveys the processed boat to an interface between the loadport 710 and the lane changer 720. An additional push bar 714 in thisexample is coupled to the load port 710 and is operable to push theprocessed boat from the conveyor 722 to a magazine stored at themagazine storage zone 716 of the load port 710, along the −X direction.The magazine receiving the processed boat may be the same as themagazine loaded by the load port 710, or may have a same type as that ofthe magazine loaded by the load port 710. In this example, the turnstage 712 on the table of the load port 710 may turn the unloadedmagazine when needed due to a certain angle between the magazine holdingdirection of the transport tool and the desired magazine direction dueto magazine storage or boat pushing. Then the transport tool can pick upthe turned magazine from the table of the load port 710 and transportthe magazine to a next processing tool for processing. In oneembodiment, the loading apparatus 700 and the processing tool areconnected to each other, e.g. via a cable or bus line, such that theycan communicate with each other to coordinate with respectiveoperations.

FIG. 7B illustrates a front view of the exemplary loading apparatus 700shown in FIG. 7A, in accordance with some embodiments of the presentdisclosure. As shown in FIG. 7B, the magazine storage zone 716 can storemultiple magazines at the same time. The push bar 713 is located to the−X direction of a magazine to be loaded for die processing; while theadditional push bar 714 is located to the X direction of a magazine tobe unloaded after die processing.

FIG. 7C illustrates a side view of the exemplary loading apparatus 700shown in FIG. 7A, in accordance with some embodiments of the presentdisclosure. FIG. 7C shows a side view from the side of the lane changer720. As shown in FIG. 7C, the conveyor 722 can move along the Ydirection and the Z direction to fit different heights and locations ofdifferent processing tool inputs. In one embodiment, the lane changer720 may include multiple conveyors that can convey multiple boats at thesame time.

FIG. 8 is a flow chart illustrating an exemplary method 800 for handlingdie carriers, in accordance with some embodiments of the presentdisclosure. As shown in FIG. 8 , a die carrier is received at operation802 in a first direction. The die carrier is operable to hold aplurality of dies. At operation 804, the die carrier is turned from thefirst direction to a second direction, e.g. for storing the die carrierand/or retrieving a boat from the die carrier. At least one die isretrieved at operation 806 from the die carrier. The at least one die isloaded at operation 808 into a processing tool for processing the atleast one die.

FIG. 9 is a flow chart illustrating another exemplary method 900 forhandling die carriers, in accordance with some embodiments of thepresent disclosure. As shown in FIG. 9 , a die carrier is received atoperation 902 in a first direction. The die carrier is operable to holda plurality of dies. At operation 904, the die carrier is turned fromthe first direction to a second direction, e.g. for storing the diecarrier and/or retrieving a boat from the die carrier. A boat includingat least one die is pushed at operation 906 from the die carrier to alane changer having a plurality of lanes. At operation 908, the boat ismoved to one of the plurality of lanes to align the boat with an inputof a processing tool. The boat is conveyed at operation 910 into theprocessing tool for processing the at least one die. It can beunderstood that the order of the steps shown in each of FIG. 8 and FIG.9 may be changed according to different embodiments of the presentdisclosure.

In an embodiment, an apparatus for handling die carriers is disclosed.The apparatus includes: a load port configured to load a die carrieroperable to hold a plurality of dies into a processing tool; and a lanechanger coupled to the load port and configured to move at least one diein the die carrier to an input of the processing tool and transfer theat least one die into the processing tool for processing the at leastone die.

In another embodiment, an apparatus for handling die carriers isdisclosed. The apparatus includes: a table configured to receive a diecarrier in a first direction, wherein the die carrier is operable tohold a plurality of dies; a turn stage coupled on the table and operableto turn the die carrier from the first direction to a second directionfor retrieving at least one die from the die carrier for processing by aprocessing tool; and a storage space configured to store a plurality ofdie carriers at a same time.

In yet another embodiment, a method for handling die carriers isdisclosed. The method includes: receiving a die carrier in a firstdirection, wherein the die carrier is operable to hold a plurality ofdies; turning the die carrier from the first direction to a seconddirection; retrieving at least one die from the die carrier; and loadingthe at least one die into a processing tool for processing the at leastone die.

The foregoing outlines features of several embodiments so that thoseordinary skilled in the art may better understand the aspects of thepresent disclosure. Those skilled in the art should appreciate that theymay readily use the present disclosure as a basis for designing ormodifying other processes and structures for carrying out the samepurposes and/or achieving the same advantages of the embodimentsintroduced herein. Those skilled in the art should also realize thatsuch equivalent constructions do not depart from the spirit and scope ofthe present disclosure, and that they may make various changes,substitutions, and alterations herein without departing from the spiritand scope of the present disclosure.

What is claimed is:
 1. An apparatus for handling die carriers,comprising: a load port configured to load dies in a die carrier into aprocessing chamber, wherein the die carrier is operable to hold aplurality of dies, wherein the load port comprises: a table configuredto receive the die carrier, and a radio frequency identity (RFID) readercoupled on the table and operable to read information on the die carrierto determine whether the die carrier is correctly scheduled forprocessing by the processing chamber.
 2. The apparatus of claim 1,wherein the load port further comprises a storage space configured tostore a plurality of die carriers at a same time.
 3. The apparatus ofclaim 1, wherein: the die carrier is transported onto the table by anoverhead hoist transport (OHT) in a first direction.
 4. The apparatus ofclaim 3, wherein: the load port comprises a turn stage coupled on thetable and operable to turn the die carrier from the first direction to asecond direction for storing the die carrier.
 5. The apparatus of claim4, wherein the die carrier is placed onto the turn stage on the table bythe OHT.
 6. The apparatus of claim 1, further comprising: a lane changercomprising a plurality of lanes located beside the load port, coupled tothe load port and configured to move at least one die in the die carrierto an input of the processing tool chamber and transfer the at least onedie into the processing chamber for processing the at least one die,wherein: the load port comprises a push bar operable to push a boatcarrying the plurality of dies from the die carrier to the lane changer;and the lane changer is configured to move the boat along at least onedirection to one of the plurality of lanes to align the boat with theinput of the processing chamber and convey the boat into the processingchamber.
 7. The apparatus of claim 6, further comprising a mappingsensor configured to determine at least one of quantity information orlocation information of boats in the die carrier.
 8. The apparatus ofclaim 6, further comprising a two-dimensional barcode reader configuredto identify and trace the boat that is processed by the processing toolchamber.
 9. The apparatus of claim 6, further comprising: an automatedoptical inspection (AOI) sensor coupled to the load port or the lanechanger, and configured to detect a defect on at least one of the diesin the die carrier, wherein the AOI sensor is further configured todetermine at least one of quantity information or size information ofthe dies in the die carrier.
 10. The apparatus of claim 6, wherein: thelane changer is further configured to receive the boat from an output ofthe processing chamber after the dies on the boat are processed, andmove along at least one direction to align the boat with an additionalpush bar associated with the load port; and the additional push bar isconfigured to push the boat back into the die carrier.
 11. An apparatusfor handling die carriers, comprising: a load port; and a lane changercomprising a plurality of lanes located beside the load port and coupledto the load port, wherein the load port comprises: a table configured toreceive a die carrier in a first direction, wherein the die carrier isoperable to hold a plurality of dies; a turn stage coupled on the tableand operable to turn the die carrier from the first direction to asecond direction for the lane changer to retrieve at least one die fromthe die carrier for processing the at least one die in a processing toolchamber; and a storage space configured to store a plurality of diecarriers at a same time.
 12. The apparatus of claim 11, furthercomprising: a radio frequency identity (RFID) reader coupled on thetable and operable to read information of the die carrier to determinewhether the die carrier is correctly scheduled for processing by theprocessing chamber, wherein the load port further comprises a push baroperable to push a boat carrying the plurality of dies from the diecarrier to the lane changer, wherein the lane changer is configured tomove the boat to one of the plurality of lanes to align the boat with aninput of the processing chamber and convey the boat into the processingchamber for processing the dies on the boat.
 13. The apparatus of claim11, wherein the load port is configured to open a first door of the diecarrier and store the first door in a predetermined location.
 14. Theapparatus of claim 13, wherein: the load port is further configured tounload the die carrier after the plurality of dies are processed; andthe load port is further configured to retrieve a second door having asame model as the first door, and close the second door onto the diecarrier that has been unloaded.
 15. The apparatus of claim 11, furthercomprising: a two-dimensional barcode reader configured to identify andtrace the boat that is processed by the processing chamber.
 16. Theapparatus of claim 11, further comprising a mapping sensor configured todetermine at least one of quantity information or location informationof boats in the die carrier.
 17. A method, comprising: receiving a diecarrier in a first direction; reading information on the die carrier todetermine whether the die carrier is correctly scheduled for processingby a processing chamber; turning the die carrier from the firstdirection to a second direction; retrieving a plurality of dies from thedie carrier; pushing the plurality of dies from the die carrier to alane changer, wherein the lane changer is configured to move theplurality of dies to one of the plurality of lanes; conveying theplurality of dies at the same time to align the plurality of dies withdifferent inputs of a processing chamber, respectively; and loading theplurality of dies into different flowing channels of the processingchamber via the different inputs, respectively, for processing theplurality of dies in the processing chamber.
 18. The method of claim 17,further comprising detecting a defect on at least one of the pluralityof dies while pushing the plurality of dies or conveying the pluralityof dies.
 19. The method of claim 18, wherein the plurality of dies arecontained in a respective one of a plurality of boats, the methodfurther comprising: receiving, via a respective one of the plurality oflanes of the lane changer, each of the plurality of boats from arespective output of the processing chamber after the plurality of diesare processed; and pushing each of the plurality of boats back into thedie carrier.
 20. The method of claim 19, further comprising receivingeach of the plurality of boats from an output of the processing chamberafter the dies on the plurality of boats are processed.